Statistics
Publications
3
Citations
149
H-Index
3
Active since
1996
Affiliations
M. Juerss is an author at Fraunhofer Institute for Silicon Technology specializing in engineering, microfabrication, and etching processes.
Publications per year
1996–1997
3
3
Bistable microvalve with pneumatically coupled membranes
Bernhard Wagner, Hans-Joachim Quenzer, S. Hoerschelmann et al. · 1996 · 85 citations
<title>Micro-optic fabrication using one-level gray-tone lithography</title>
Klaus Reimer, Hans Joachim Quenzer, M. Juerss et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 47 citations
Engineering, Electrical Engineering, Manufacturing Engineering +15
<title>Fabrication of microrelief surfaces using a one-step lithography process</title>
Klaus Reimer, Ulrich Hofmann, M. Juerss et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 17 citations
Engineering, Manufacturing Engineering, Microfabrication +15
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