K. T. Kohlmann-von Platen

Publications

165

Citations

H-Index

1992

Active since

Affiliations

Fraunhofer Institute for Silicon Technology(Current)

K. T. Kohlmann-von Platen is an author at Fraunhofer Institute for Silicon Technology specializing in applied physics, engineering, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial SciencePhysicsMicroelectronicsMicrofabricationElectrical EngineeringDesignTechnology

Publications per year

1992–1999

Publications

Resolution limits in electron-beam induced tungsten deposition

K. T. Kohlmann-von Platen, J. Chlebek, K. Reimer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 81 citations

Materials Science, Electron-beam Induced Tungsten, Electron-beam Induced Deposition +14

Electron-beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics

K. T. Kohlmann-von Platen, Leandro Buchmann, H.-C. Petzold et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 60 citations

Materials Science, Electrical Engineering, Ion Implantation +15

Electron-beam induced etching of resist with water vapor as the etching medium

K. T. Kohlmann-von Platen, W.H. Bruenger · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 13 citations

Materials Engineering, Electrical Engineering, H2o Vapor +15

<title>Progress in gray-tone lithography and replication techniques for different materials</title>

Klaus Reimer, Rainer Engelke, Ulrich Hofmann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 11 citations

Optical Materials, Engineering, Micro-optical Component +20

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