W.H. Bruenger

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B. K. Teo, Manish Chhowalla, G.A.J. Amaratunga et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 94 citations

Engineering, Electrical Engineering, Materials Science +17

Measuring acid generation efficiency in chemically amplified resists with all three beams

Charles R. Szmanda, Robert L. Brainard, Joseph F. Mackevich et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 46 citations

Medicine, Chemistry, Radiation Dosimetry +11

Nanocomposite resist systems for next generation lithography

Lhadi Merhari, Kenneth E. Gonsalves, Yue Hu et al. · Microelectronic Engineering · 2002 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +13

Ion projection direct structuring for patterning of magnetic media

Andreas Dietzel, Rüdiger Berger, H. Grimm et al. · IEEE Transactions on Magnetics · 2002 · 33 citations

Natural Sciences, Materials Engineering, Materials Science +17

Nanopatterning of Magnetic Disks by Single‐Step Ar⁺ Ion Projection

Andreas Dietzel, R. Berger, Hans Loeschner et al. · Advanced Materials · 2003 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +12