11
Publications
1.1K
Citations
11
H-Index
1986
Active since
Charles R. Szmanda is an author at University at Albany, State University of New York specializing in engineering, chemistry, and photochemistry.
Top concepts
EngineeringChemistryPhotochemistryPhysicsApplied PhysicsMaterial ScienceChemical EngineeringOptoelectronicsChemical KineticsOptical Properties
Publications per year
1986–2011
11
11
Programmable polymer thin film and non-volatile memory device
Jianyong Ouyang, Chih‐Wei Chu, Charles R. Szmanda et al. · Nature Materials · 2004 · 878 citations
Measuring acid generation efficiency in chemically amplified resists with all three beams
Charles R. Szmanda, Robert L. Brainard, Joseph F. Mackevich et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 45 citations
Chemical Engineering, Electrical Engineering, Engineering +15
Craig Higgins, Charles R. Szmanda, Alin Antohe et al. · Japanese Journal of Applied Physics · 2011 · 42 citations
Optical Materials, Engineering, Electron-beam Lithography +26
On The Dissolution Kinetics Of Positive Photoresists: The Secondary Structure Model
Michael K. Templeton, Charles R. Szmanda, Anthony Zampini · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1987 · 31 citations
Engineering, Several Model Resins, Computational Chemistry +17
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