Alin Antohe

Statistics

Publications

Citations

186

H-Index

Active since

2007

Affiliations

University at Albany, State University of New York(Current)

Magyar Agrár- és Élettudományi Egyetem

Albany State University

Alin Antohe is an author at University at Albany, State University of New York specializing in materials science, electronic materials, and optical materials.

ORCID

Publications per year

2007–2021

Publications

Resolution, Line-Edge Roughness, Sensitivity Tradeoff, and Quantum Yield of High Photo Acid Generator Resists for Extreme Ultraviolet Lithography

Craig Higgins, Charles R. Szmanda, Alin Antohe et al. · Japanese Journal of Applied Physics · 2011 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +13

RLS tradeoff vs. quantum yield of high PAG EUV resists

Craig Higgins, Alin Antohe, Greg Denbeaux et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 25 citations

Natural Sciences, Chemistry, Materials Science +13

Resolution, Line-Edge Roughness, Sensitivity Tradeoff, and Quantum Yield of High Photo Acid Generator Resists for Extreme Ultraviolet Lithography

Charles R. Szmanda, Alin Antohe, Jacque H. Georger et al. · Japanese Journal of Applied Physics · 2011 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +13

Film quantum yields of EUV and ultra-high PAG photoresists

Elsayed Hassanein, Craig Higgins, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

Natural Sciences, Chemistry, Materials Science +13

A low-loss SiN photonic integrated circuit foundry platform for waveguide-enhanced Raman spectroscopy

Nathan F. Tyndall, Todd H. Stievater, Dmitry A. Kozak et al. · 2021 · 21 citations

Engineering, Materials Engineering, Materials Science +17

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