Concepedia

Patrick Naulleau

PN

Statistics

Publications

129

Citations

3.2K

H-Index

31

Active since

1995

Affiliations

Lawrence Berkeley National Laboratory(Current)

University of California, Berkeley

Lawrence Livermore National Laboratory

Intel (United States)

University at Albany, State University of New York

Patrick Naulleau is an author at Lawrence Berkeley National Laboratory specializing in natural sciences, optics, and materials science.

Publications per year

1995–2022

129

Publications

129

Biological soft X-ray tomography on beamline 2.1 at the Advanced Light Source

Mark A. Le Gros, Gerry McDermott, Bertrand Cinquin et al. · Journal of Synchrotron Radiation · 2014 · 96 citations · Full text

, , +13

Hartmann wave-front measurement at 134 nm with λ_EUV/120 accuracy

Pascal Mercère, Philippe Zeitoun, Mourad Idir et al. · Optics Letters · 2003 · 95 citations

, , +15

Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy

Patrick Naulleau, Kenneth A. Goldberg, Sang H. Lee et al. · Applied Optics · 1999 · 92 citations

, , +14

Resist Materials for Extreme Ultraviolet Lithography: Toward Low‐Cost Single‐Digit‐Nanometer Patterning

Paul D. Ashby, Deirdre L. Olynick, D. Frank Ogletree et al. · Advanced Materials · 2015 · 73 citations

, , +13

Directly patterned inorganic hardmask for EUV lithography

Jason K. Stowers, Alan Telecky, Michael Kocsis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 66 citations

, , +14

1–5 of 129