Concepedia

Elsayed Hassanein

EH

4

Publications

125

Citations

4

H-Index

2008

Active since

Affiliations

University at Albany, State University of New York(Current)

Lawrence Berkeley National Laboratory

Elsayed Hassanein is an author at University at Albany, State University of New York specializing in engineering, optical properties, and physics.

Top concepts

EngineeringPhysicsPhotochemistryApplied PhysicsOptical PropertiesHealthChemistryPhotonicsOptoelectronicsChemical Engineering

Publications per year

2008–2008

4

Publications

4

Resolution, LER, and sensitivity limitations of photoresists

Gregg M. Gallatin, Patrick Naulleau, Dimitra Niakoula et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 48 citations

Super-resolution Imaging, Rls Tradeoff, Engineering +11

Film Quantum Yields of Ultrahigh PAG EUV Photoresists

Robert L. Brainard, Craig Higgins, Elsayed Hassanein et al. · Journal of Photopolymer Science and Technology · 2008 · 31 citations · Full text

Photonics, Chemical Engineering, Engineering +13

Photons, electrons, and acid yields in EUV photoresists: a progress report

Robert L. Brainard, Elsayed Hassanein, Juntao Li et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 24 citations

Engineering, Electron-beam Lithography, Resist Materials +19

Film quantum yields of EUV and ultra-high PAG photoresists

Elsayed Hassanein, Craig Higgins, Patrick Naulleau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 22 citations

Engineering, Inorganic Photochemistry, Chemistry +18

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