Concepedia

R. Berger

RB

5

Publications

255

Citations

5

H-Index

2002

Active since

Affiliations

Fraunhofer Institute for Silicon Technology(Current)

Institut für Mikroelektronik Stuttgart

Max Planck Institute for Polymer Research

R. Berger is an author at Fraunhofer Institute for Silicon Technology specializing in microfabrication, engineering, and physics.

Top concepts

EngineeringMicrofabricationPhysicsApplied PhysicsMaterial ScienceMagnetismMicroscopyNanotechnologyInstrumentationNanofabrication

Publications per year

2002–2007

5

Publications

5

High-resolution magnetic Co supertips grown by a focused electron beam

Ivo Utke, P. Hoffmann, R. Berger et al. · Applied Physics Letters · 2002 · 159 citations

Magnetic Properties, Engineering, Microscopy +27

Read-out of micromechanical cantilever sensors by phase shifting interferometry

Mark Helm, Jean-Jacques Servant, F. Saurenbach et al. · Applied Physics Letters · 2005 · 41 citations

Materials Science, Engineering, Sensors +14

Nanopatterning of Magnetic Disks by Single‐Step Ar<sup>+</sup> Ion Projection

Andreas Dietzel, R. Berger, Hans Loeschner et al. · Advanced Materials · 2003 · 27 citations

Magnetic Properties, Engineering, Magnetic Materials +24

Multiwell micromechanical cantilever array reader for biotechnology

R. Zhang, A. Best, R. Berger et al. · Review of Scientific Instruments · 2007 · 17 citations

Large-field ion optics for projection and proximity printing and for maskless lithography (ML2)

Hans Loeschner, G. Stengl, H. Buschbeck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +20

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