Concepedia

H. Buschbeck

HB

Statistics

Publications

4

Citations

62

H-Index

4

Active since

1994

Affiliations

Infineon Technologies (Germany)(Current)

University of Houston

IMS Nanofabrication (Austria)

Netherlands Organisation for Applied Scientific Research

H. Buschbeck is an author at Infineon Technologies (Germany) specializing in projection lithography, materials science, and ion optics.

Publications per year

1994–2002

4

Publications

4

Novel electrostatic column for ion projection lithography

A. Chalupka, G. Stengl, H. Buschbeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations

Natural Sciences, Materials Science, Physics +11

Ion projection lithography below 70 nm: tool performance and resist process

Stefan Hirscher, M. Kümmel, Oliver Kirch et al. · Microelectronic Engineering · 2002 · 15 citations

Engineering, Electrical Engineering, Materials Science +11

Experimental results of the stochastic Coulomb interaction in ion projection lithography

P.W.H. de Jager, G. Derksen, B. Mertens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations

Natural Sciences, Physics, Optics +9

Large-field ion optics for projection and proximity printing and for maskless lithography (ML2)

Hans Loeschner, G. Stengl, H. Buschbeck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Engineering, Electrical Engineering, Manufacturing Engineering +11

1–4 of 4