3
Publications
36
Citations
3
H-Index
2001
Active since
Affiliations
Stefan Hirscher is an author at Infineon Technologies (Germany) specializing in microelectronics, applied physics, and microfabrication.
Top concepts
EngineeringApplied PhysicsMicroelectronicsMicrofabricationMicroscopyInstrumentationPhysicsMaterial ScienceOptical MaterialsOptical Properties
Publications per year
2001–2002
3
3
Large-field ion optics for projection and proximity printing and for maskless lithography (ML2)
Hans Loeschner, G. Stengl, H. Buschbeck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations
Optical Materials, Engineering, Electron-beam Lithography +20
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