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Oliver Kirch

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1

Publications

15

Citations

1

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2002

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Affiliations

IMS Nanofabrication (Austria)(Current)

Oliver Kirch is an author at IMS Nanofabrication (Austria) specializing in instrumentation, engineering, and microfabrication.

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Publications per year

2002–2002

1

Publications

1

Ion projection lithography below 70 nm: tool performance and resist process

Stefan Hirscher, M. Kümmel, Oliver Kirch et al. · Microelectronic Engineering · 2002 · 15 citations

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