Statistics
Publications
29
Citations
520
H-Index
15
Active since
1975
G. Stengl is an author at IMS Nanofabrication (Austria) specializing in engineering, projection lithography, and mask fabrication.
Publications per year
1975–2003
29
29
Ion projection system for IC production
G. Stengl, R. Kaitna, H. Löschner et al. · Journal of Vacuum Science and Technology · 1979 · 37 citations
Ion projection lithography: International development program
Rainer Kaesmaier, Hans Löschner, G. Stengl et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 31 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
Ion projection lithography machine IPLM-01: A new tool for sub-0.5-micron modification of materials
G. Stengl, H. Löschner, Wilhelm Maurer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 30 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
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