H. Löschner

Ion projection system for IC production

G. Stengl, R. Kaitna, H. Löschner et al. · Journal of Vacuum Science and Technology · 1979 · 37 citations

Engineering, Electrical Engineering, Materials Science +14

Ion projection lithography machine IPLM-01: A new tool for sub-0.5-micron modification of materials

G. Stengl, H. Löschner, Wilhelm Maurer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 30 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

SOI wafer flow process for stencil mask fabrication

Joerg Butschke, Albrecht Ehrmann, B. Höfflinger et al. · Microelectronic Engineering · 1999 · 26 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Novel electrostatic column for ion projection lithography

A. Chalupka, G. Stengl, H. Buschbeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations

Natural Sciences, Materials Science, Physics +11

Experimental investigation of stochastic space charge effects on pattern resolution in ion projection lithography systems

E. Hammel, A. Chalupka, J. Fegerl et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 16 citations

Engineering, Physics, Microelectromechanical Systems +10