Concepedia

J. Fegerl

JF

4

Publications

54

Citations

4

H-Index

1992

Active since

Affiliations

IMS Nanofabrication (Austria)(Current)

J. Fegerl is an author at IMS Nanofabrication (Austria) specializing in microscopy, physics, and applied physics.

Top concepts

Publications per year

1992–1994

4

Publications

4

Experimental investigation of stochastic space charge effects on pattern resolution in ion projection lithography systems

E. Hammel, A. Chalupka, J. Fegerl et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 16 citations

, , +19

Projection ion beam lithography

H. Löschner, G. Stengl, A. Chalupka et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 14 citations

, , +14

Progress in ion projection lithography

A. Chalupka, J. Fegerl, R. Fischer et al. · Microelectronic Engineering · 1992 · 13 citations

, , +5

Ion projection lithography for vacuum microelectronics

H. Löschner, G. Stengl, A. Chalupka et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 11 citations

, , +17

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