Statistics
Publications
20
Citations
422
H-Index
13
Active since
1972
A. Chalupka is an author at IMS Nanofabrication (Austria) specializing in engineering, physics, and applied physics.
Publications per year
1972–2010
20
20
Novel electrostatic column for ion projection lithography
A. Chalupka, G. Stengl, H. Buschbeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations
Optical Materials, Engineering, Electron-beam Lithography +20
J. Kern, A. Raemy, W. Beer et al. · Nuclear Physics A · 1991 · 23 citations
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