20
Publications
422
Citations
13
H-Index
1972
Active since
A. Chalupka is an author at IMS Nanofabrication (Austria) specializing in engineering, physics, and applied physics.
Top concepts
EngineeringPhysicsApplied PhysicsMicroscopyInstrumentationNuclear PhysicsMicrofabricationMicroelectronicsNatural SciencesElectrical Engineering
Publications per year
1972–2010
20
20
Novel electrostatic column for ion projection lithography
A. Chalupka, G. Stengl, H. Buschbeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations
Optical Materials, Engineering, Electron-beam Lithography +20
J. Kern, A. Raemy, W. Beer et al. · Nuclear Physics A · 1991 · 23 citations
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