7
Publications
260
Citations
7
H-Index
1988
Active since
R. Fischer is an author at IMS Nanofabrication (Austria) specializing in applied physics, instrumentation, and microscopy.
Top concepts
MicroscopyApplied PhysicsInstrumentationPhysicsEngineeringIon Beam PhysicsMicroelectronicsMicrofabricationElectrical EngineeringMedicine
Publications per year
1988–1994
7
7
Novel electrostatic column for ion projection lithography
A. Chalupka, G. Stengl, H. Buschbeck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 24 citations
Optical Materials, Engineering, Electron-beam Lithography +20
Rows per page
1–5 of 7