R. Kaitna is an author at Technikon (Austria) specializing in engineering, applied physics, and microelectronics.
Top concepts
EngineeringApplied PhysicsInstrumentationSurface ScienceMicroelectronicsMicrofabricationIntegrated CircuitsPhysicsEducationMicroscopy
Publications per year
1979–1994
3
3
Ion projection system for IC production
G. Stengl, R. Kaitna, H. Löschner et al. · Journal of Vacuum Science and Technology · 1979 · 37 citations
Ion Projection System, Engineering, Electron-beam Lithography +20
Rows per page
1–3 of 3