Hans Löschner

Reactive ion etching for microelectrical mechanical system fabrication

Ivaylo W. Rangelow, Hans Löschner · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 64 citations

Engineering, Materials Engineering, Materials Science +16

Ion projection lithography: International development program

Rainer Kaesmaier, Hans Löschner, G. Stengl et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 31 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Ion projection lithography for sub-micron modification of materials

G. Stengl, Hans Löschner, Peter Wolf · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1987 · 18 citations

Engineering, Materials Engineering, Materials Science +12

Ion projection lithography: Status of the MEDEA project and United States/European cooperation

G. Gross, Rainer Kaesmaier, Hans Löschner et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 16 citations

Engineering, Electrical Engineering, Physics +13

Ion Projection Lithography: Progress of European MEDEA & International Program

Rainer Kaesmaier, Hans Löschner · Microelectronic Engineering · 2000 · 13 citations

Engineering, Electrical Engineering, Materials Science +8