Concepedia
Statistics
Publications
5
Citations
85
H-Index
Active since
1996
Affiliations
Delft University of Technology(Current)
ASML (Netherlands)
Netherlands Organisation for Applied Scientific Research
P.W.H. de Jager is an author at Delft University of Technology specializing in natural sciences, physics, and radiation physics.
Publications per year
1996–2007
Mitigation of surface contamination from resist outgassing in EUV lithography
B. Mertens, B. van der Zwan, P.W.H. de Jager et al. · Microelectronic Engineering · 2000 · 31 citations
Natural Sciences, Materials Engineering, Materials Science +10
Influence of Coulomb interactions on current density distribution in a two-lens focused ion beam system
J. Bi, P.W.H. de Jager, J. Barth et al. · Microelectronic Engineering · 1998 · 18 citations
Natural Sciences, Nuclear Engineering, Physics +11
High throughput defect detection with multiple parallel electron beams
H. M. P. van Himbergen, M. D. Nijkerk, P.W.H. de Jager et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 13 citations
Engineering, Electrical Engineering, Photonics +16
Experimental results of the stochastic Coulomb interaction in ion projection lithography
P.W.H. de Jager, G. Derksen, B. Mertens et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 12 citations
Natural Sciences, Physics, Optics +9
The influence of ion beam parameters on pattern resolution
P.W.H. de Jager, P. Kruit · Microelectronic Engineering · 1996 · 11 citations
Natural Sciences, Physics, Pattern Formation +7
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