B. Mertens

First performance results of the ASML alpha demo tool

H. Meiling, H.C. Meijer, Vadim Banine et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 78 citations

Performance Benchmarking, Short Wavelength Optic, Engineering +24

Molecular contamination mitigation in EUVL by environmental control

N.B. Koster, B. Mertens, R. Jansen et al. · Microelectronic Engineering · 2002 · 35 citations

Environmental Chemistry, Chemical Safety, Engineering +8

J-dependence in reactions on 24Mg, 28Si and 30Si

H. Kattenborn, C. Mayer‐Böricke, B. Mertens · Nuclear Physics A · 1969 · 34 citations

Mechanism Of Action, Reactivity (Chemistry), Reaction Intermediate +2

Mitigation of surface contamination from resist outgassing in EUV lithography

B. Mertens, B. van der Zwan, P.W.H. de Jager et al. · Microelectronic Engineering · 2000 · 29 citations

Engineering, Electron-beam Lithography, Surface Contamination +8

<title>Prevention of MoSi multilayer reflection loss in EUVL tools</title>

H. Meiling, B. Mertens, F. Stietz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 21 citations

Chemical Engineering, Reliability Engineering, Engineering +12