N.B. Koster

Publications

366

Citations

H-Index

1994

Active since

Affiliations

Netherlands Organisation for Applied Scientific Research(Current)

Institute for Atomic and Molecular Physics

Lawrence Livermore National Laboratory

General Atomics (United States)

Princeton Plasma Physics Laboratory

N.B. Koster is an author at Netherlands Organisation for Applied Scientific Research specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceInstrumentationOptical PropertiesSurface ScienceMicrofabricationPhysicsX-ray ImagingMicroelectronics

Publications per year

1994–2019

Publications

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1995 · 52 citations

Materials Science, Optical Materials, Engineering +8

Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1994 · 47 citations

Materials Science, Engineering, Electron-beam Lithography +12

Temperature induced diffusion in Mo/Si multilayer mirrors

H.-J. Voorma, E. Louis, N.B. Koster et al. · Journal of Applied Physics · 1998 · 47 citations

Materials Engineering, Materials Science, Engineering +14

Molecular contamination mitigation in EUVL by environmental control

N.B. Koster, B. Mertens, R. Jansen et al. · Microelectronic Engineering · 2002 · 35 citations

Environmental Chemistry, Chemical Safety, Engineering +8

Characterization of multilayers by Fourier analysis of x-ray reflectivity

H.-J. Voorma, E. Louis, N.B. Koster et al. · Journal of Applied Physics · 1997 · 29 citations

Materials Science, Layer Thickness, Surface Characterization +15

Rows per page

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