H.-J. Voorma

Statistics

Publications

Citations

300

H-Index

Active since

1992

Affiliations

Institute for Atomic and Molecular Physics(Current)

Lawrence Berkeley National Laboratory

H.-J. Voorma is an author at Institute for Atomic and Molecular Physics specializing in materials science, materials engineering, and natural sciences.

Publications per year

1992–2007

Publications

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1995 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +14

EUV lithography with the Alpha Demo Tools: status and challenges

Noreen Harned, M. Goethals, Rogier Groeneveld et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 49 citations

Engineering, Electrical Engineering, Materials Science +8

Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1994 · 47 citations

Natural Sciences, Materials Engineering, Materials Science +16

Temperature induced diffusion in Mo/Si multilayer mirrors

H.-J. Voorma, E. Louis, N.B. Koster et al. · Journal of Applied Physics · 1998 · 47 citations

Engineering, Materials Engineering, Materials Science +17

Angular and energy dependence of ion bombardment of Mo/Si multilayers

H.-J. Voorma, E. Louis, F. Bijkerk et al. · Journal of Applied Physics · 1997 · 38 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 9