F. Bijkerk

Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source

A. A. Dolgov, D. V. Lopaev, Chris Lee et al. · Applied Surface Science · 2015 · 228 citations · Full text

Natural Sciences, Materials Science, Physics +6

Nanometer interface and materials control for multilayer EUV-optical applications

E. Louis, Andrey Yakshin, T. Tsarfati et al. · Progress in Surface Science · 2011 · 156 citations

Natural Sciences, Materials Engineering, Materials Science +16

Spectral tailoring of nanoscale EUV and soft x-ray multilayer optics

Qiushi Huang, V. V. Medvedev, Robbert Wilhelmus Elisabeth van de Kruijs et al. · Applied Physics Reviews · 2017 · 100 citations · Full text

Natural Sciences, Materials Science, Physics +15

High-reflectance La/B-based multilayer mirror for 6x  nm wavelength

D. S. Kuznetsov, Andrey Yakshin, Jacobus M. Sturm et al. · Optics Letters · 2015 · 75 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Single shot damage mechanism of Mo/Si multilayer optics under intense pulsed XUV-exposure

A. R. Khorsand, R. Sobierajski, E. Louis et al. · Optics Express · 2010 · 68 citations · Full text

Natural Sciences, Materials Science, Physics +17