T. Tsarfati

Nanometer interface and materials control for multilayer EUV-optical applications

E. Louis, Andrey Yakshin, T. Tsarfati et al. · Progress in Surface Science · 2011 · 152 citations

Materials Science, Optical Materials, Engineering +7

Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

T. Tsarfati, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout et al. · Thin Solid Films · 2009 · 57 citations · Full text

Photonics, Optical Materials, Reflective Multilayer Optics +11

Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

T. Tsarfati, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout et al. · Thin Solid Films · 2010 · 34 citations · Full text

Materials Science, Optical Materials, X-ray Spectroscopy +8

In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers

Juequan Chen, Eric Louis, Rob Harmsen et al. · Applied Surface Science · 2011 · 33 citations · Full text

Surface Characterization, Engineering, Electron-beam Lithography +12

Atomic O and H exposure of C-covered and oxidized d-metal surfaces

T. Tsarfati, E. Zoethout, Robbert Wilhelmus Elisabeth van de Kruijs et al. · Surface Science · 2009 · 20 citations · Full text

Materials Science, Surface Characterization, Atomic O +11