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Enhancement of reflectivity of multilayer mirrors for soft x-ray projection lithography by temperature optimization and ion bombardment

DOI

47

Citations

6

References

1994

Year

E. Louis, H.-J. Voorma, N.B. Koster, F. Bijkerk, Rutger Schlatmann, J. Verhoeven, Yu.Ya. Platonov, G. E. van Dorssen, H. A. Padmore
Microelectronic Engineering

References

YearCitations

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