Concepedia

Rogier Groeneveld

RG

2

Publications

127

Citations

2

H-Index

2006

Active since

Affiliations

Carl Zeiss (Germany)(Current)

ASML (Netherlands)

Rogier Groeneveld is an author at Carl Zeiss (Germany) specializing in instrumentation, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsInstrumentationMicrofabricationEducationPhotonicsTechnology3D PrintingOptical SystemsOptoelectronics

Publications per year

2006–2007

2

Publications

2

First performance results of the ASML alpha demo tool

H. Meiling, H.C. Meijer, Vadim Banine et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 78 citations

Performance Benchmarking, Short Wavelength Optic, Engineering +24

EUV lithography with the Alpha Demo Tools: status and challenges

Noreen Harned, M. Goethals, Rogier Groeneveld et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 49 citations

Engineering, Electron-beam Lithography, Target Fabrication +16

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