Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 13 citations · 4 references
EngineeringElectrical EngineeringPhotonicsRadiation DetectionSemiconductor DevicesDetector TechnologyElectron Beam PhysicsRadiation Detector ArraysRadiation DetectorsScintillation DetectorsSemiconductor DetectorsDetector Array DesignDetector ArraysElectron Beam FocusingElectron Beam OpticsImaging DetectorsScintillator Array DesignSecondary Electron DetectorsSemiconductor Detector Arrays
A new concept for high throughput defect detection with multiple parallel electron beams is described. As many as 30 000 beams can be placed on a footprint of a in.2, each beam having its own microcolumn and detection system without cross-talk. Based on the International Technology Roadmap for Semiconductors requirements, some high level properties of the implementation of this concept were derived. A projection lens was designed that can both focus the primary beam into a small spot and simultaneously collect 75% of the secondary electrons. Conceptual design studies were performed for three crucial components of the detector chain: the scintillator, the light optics, and the detection array. The throughput of this concept is expected to be at least a factor of 300 higher than standard electron beam based defect detection systems.
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<title>High-throughput NGL electron-beam direct-write lithography system</title>
N. W. Parker, Alan D. Brodie, John H. McCoy · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 32 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13