W. D. Meisburger

High speed maskless lithography of printed circuit boards using digital micromirrors

Eric J. Hansotte, Edward C. Carignan, W. D. Meisburger · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 37 citations

High Resolution, Engineering, Electron-beam Lithography +16

Low-voltage electron-optical system for the high-speed inspection of integrated circuits

W. D. Meisburger, Alan D. Brodie, Ami A. Desai · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 34 citations

Engineering, Microscopy, Integrated Circuits +26

Distributed axis electron beam technology for maskless lithography and defect inspection

D. S. Pickard, T. R. Groves, W. D. Meisburger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 26 citations

Engineering, Electron-beam Lithography, Microscopy +22

Prospects for charged particle lithography as a manufacturing technology

R. F. W. Pease, Liqun Han, G. I. Winograd et al. · Microelectronic Engineering · 2000 · 19 citations

Materials Science, Engineering, Electron-beam Lithography +7

Space-charge-induced aberrations

G. I. Winograd, W. D. Meisburger, R. F. W. Pease · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 16 citations

Photonics, Beam Blur, Engineering +14