Concepedia
Statistics
Publications
8
Citations
134
H-Index
Active since
1996
Affiliations
Stanford University(Current)
Intevac (United States)
G. I. Winograd is an author at Stanford University specializing in engineering, applied physics, and microscopy.
Top concepts
EngineeringApplied PhysicsMicroscopyOptoelectronicsElectrical EngineeringPhysicsPhotonicsParticle Beam PhysicsMicroelectronicsMicrofabrication
Publications per year
1996–2000
Semiconductor on glass photocathodes as high-performance sources for parallel electron beam lithography
Jens Schneider, Aaron W. Baum, G. I. Winograd et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 25 citations
Engineering, Electron-beam Lithography, Microscopy +18
Patterned negative electron affinity photocathodes for maskless electron beam lithography
Jens Schneider, Pradeep Sen, D. S. Pickard et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 24 citations
Photonics, Electrical Engineering, Engineering +14
Prospects for charged particle lithography as a manufacturing technology
R. F. W. Pease, Liqun Han, G. I. Winograd et al. · Microelectronic Engineering · 2000 · 19 citations
Materials Science, Engineering, Electron-beam Lithography +7
Demonstration of multiblanker electron-beam technology
G. I. Winograd, Vidhya Krishnamurthi, R. Garcı́a et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 17 citations
Engineering, Electron-beam Lithography, Microscopy +16
Space-charge-induced aberrations
G. I. Winograd, W. D. Meisburger, R. F. W. Pease · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 16 citations
Photonics, Beam Blur, Engineering +14
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