Alan D. Brodie

Electron optical column for a multicolumn, multibeam direct-write electron beam lithography system

Enhuai Yin, Alan D. Brodie, Frank Tsai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 41 citations

Engineering, Electron-beam Lithography, Microscopy +20

Low-voltage electron-optical system for the high-speed inspection of integrated circuits

W. D. Meisburger, Alan D. Brodie, Ami A. Desai · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 34 citations

Engineering, Microscopy, Integrated Circuits +26

REBL: A novel approach to high speed maskless electron beam direct write lithography

Paul Petric, Chris Bevis, Allen Carroll et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 33 citations

Engineering, Electron-beam Lithography, Microscopy +20

REBL nanowriter: Reflective Electron Beam Lithography

Paul Petric, Chris Bevis, Alan D. Brodie et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 32 citations · Full text

Engineering, Electron-beam Lithography, Microscopy +18

<title>High-throughput NGL electron-beam direct-write lithography system</title>

N. W. Parker, Alan D. Brodie, John H. McCoy · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 31 citations

Electrical Engineering, Wafer Scale Processing, Engineering +13