Concepedia

Mamoru Nakasuji

MN

4

Publications

64

Citations

4

H-Index

1980

Active since

Affiliations

Nikon (Japan)(Current)

Mamoru Nakasuji is an author at Nikon (Japan) specializing in engineering, applied physics, and instrumentation.

Top concepts

EngineeringApplied PhysicsInstrumentationPhysicsMicroscopyMicroelectronicsParticle Beam PhysicsSynchrotron RadiationMedicineLens Design

Publications per year

1980–2005

4

Publications

4

Single crystal LaB6 electron gun for variably shaped electron beam optics

Mamoru Nakasuji, H. Wada · Journal of Vacuum Science and Technology · 1980 · 24 citations

Optical Materials, Engineering, Electron-beam Lithography +16

Low voltage and high speed operating electrostatic wafer chuck

Mamoru Nakasuji, Hiroyasu Shimizu · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 18 citations

Low-power Electronics, Materials Science, Electrical Engineering +13

Feasibility Study of Multiple-Beam Scanning Electron Microscopy for Defect Inspection

Mamoru Nakasuji, Shoji Yoshikawa, T. Satake et al. · Japanese Journal of Applied Physics · 2005 · 11 citations

Engineering, Microscopy, Secondary Electrons +17

Computer simulation for a large-field electron-beam-reducing image projector

Mamoru Nakasuji, Syouhei Suzuki, Hiroyasu Shimizu · Review of Scientific Instruments · 1993 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +23

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