Mamoru Nakasuji - Concepedia

Author

Mamoru Nakasuji

Also Known As

M. Nakasuji, Mamoru Nakasuji, Mamoru Nakasuji Mamoru Nakasuji

Publications

104

Citations

H-Index

Concepts

All Affiliations

Mamoru Nakasuji is an author at Nikon (Japan) specializing in engineering, applied physics, and instrumentation.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	64
2	Applied Physics	3	3	46
3	Medicine	1	1	11
4	Computer Engineering	1	1	11
5	Electrical Engineering	1	1	18

Mamoru Nakasuji

Publications

Citations

H-Index

Page 1

	Year	Citations
Single crystal LaB6 electron gun for variably shaped electron beam optics Mamoru Nakasuji, H. Wada Journal of Vacuum Science and Technology Optical MaterialsEngineeringElectron-beam LithographyElectron DiffractionHigh-power Lasers	1980	24
Low voltage and high speed operating electrostatic wafer chuck Mamoru Nakasuji, Hiroyasu Shimizu Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Low-power ElectronicsMaterials ScienceElectrical EngineeringWafer Scale ProcessingEngineering	1992	18
Feasibility Study of Multiple-Beam Scanning Electron Microscopy for Defect Inspection Mamoru Nakasuji, Shoji Yoshikawa, T. Satake, Japanese Journal of Applied Physics EngineeringMicroscopySecondary ElectronsFeasibility StudyElectron Optic	2005	11
Computer simulation for a large-field electron-beam-reducing image projector Mamoru Nakasuji, Syouhei Suzuki, Hiroyasu Shimizu Review of Scientific Instruments EngineeringElectron-beam LithographyMicroscopyOptic DesignElectron Optic	1993	11

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