H. Wada

Electron-beam direct writing system EX-8D employing character projection exposure method

Kiyoshi Hattori, Ryoichi Yoshikawa, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 43 citations

Engineering, Electron-beam Lithography, Microscopy +16

Resist heating effect in direct electron beam writing

Takayuki Abe, Kenji Ohta, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 28 citations

Materials Engineering, Electrical Engineering, Engineering +15

Single crystal LaB6 electron gun for variably shaped electron beam optics

Mamoru Nakasuji, H. Wada · Journal of Vacuum Science and Technology · 1980 · 24 citations

Optical Materials, Engineering, Electron-beam Lithography +16

Partial discharge signal propagation characteristics inside the winding of oil-immersed power transformer using the equivalent circuit of winding model in the oil

Shigemitsu Okabe, Genyo Ueta, H. Wada · IEEE Transactions on Dielectrics and Electrical Insulation · 2012 · 22 citations

Electrical Engineering, Partial Discharge, Engineering +7

Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation

Kiyoshi Hattori, Osamu Ikenaga, Syuichi Tamamushi et al. · Japanese Journal of Applied Physics · 1989 · 15 citations

Electrical Engineering, Engineering, Rectangular Shaped Beam +14