Concepedia

Syuichi Tamamushi

ST

1

Publications

15

Citations

1

H-Index

1989

Active since

Affiliations

Toshiba (Japan)(Current)

Syuichi Tamamushi is an author at Toshiba (Japan) specializing in synchrotron radiation, instrumentation, and calibration.

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Publications per year

1989–1989

1

Publications

1

Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation

Kiyoshi Hattori, Osamu Ikenaga, Syuichi Tamamushi et al. · Japanese Journal of Applied Physics · 1989 · 15 citations

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