Concepedia

Author

Syuichi Tamamushi

Toshiba (Japan)

Also Known As

Syuichi Tamamushi

2

Publications

15

Citations

1

H-Index

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Concepts

All Affiliations

Toshiba (Japan)
ST

About

Syuichi Tamamushi is an author at Toshiba (Japan) specializing in synchrotron radiation, instrumentation, and calibration.

Top Concepts

#ConceptH-IndexPublicationsCitations

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Education

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Engineering

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Applied Physics

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Electrical Engineering

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Measurement

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Syuichi Tamamushi

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1

Publications

15

Citations

1

H-Index

YearCitations

Triangular Shaped Beam Technique in EB Exposure System EX-7 for ULSI Pattern Formation

Kiyoshi Hattori, Osamu Ikenaga, Syuichi Tamamushi,

Japanese Journal of Applied Physics

1989

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