Statistics
Publications
11
Citations
274
H-Index
10
Active since
1956
Affiliations
Kiyoshi Hattori is an author at Toshiba (Japan) specializing in engineering, electron beam lithography, and microbiology.
Publications per year
1956–2016
11
11
Electron-beam direct writing system EX-8D employing character projection exposure method
Kiyoshi Hattori, Ryoichi Yoshikawa, H. Wada et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 43 citations
Engineering, Computer Engineering, Electrical Engineering +16
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