The role of MEMS in maskless lithography

"Dip-Pen" Nanolithography

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Natural Sciences, Materials Engineering, Materials Science +15

The “Millipede”—More than thousand tips for future AFM storage

P. Vettiger, M. Despont, Ute Drechsler et al. · IBM Journal of Research and Development · 2000 · 566 citations

Engineering, Materials Engineering, Materials Science +13

Multiple electron-beam lithography

T. H. P. Chang, Marián Maňkoš, Kim Y. Lee et al. · Microelectronic Engineering · 2001 · 122 citations

Electron-beam microcolumns for lithography and related applications

T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations

Engineering, Manufacturing Engineering, Materials Science +11

Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system

K. B. K. Teo, Manish Chhowalla, G.A.J. Amaratunga et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 94 citations

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