Concepedia

H.-C. Petzold

HP

Statistics

Publications

5

Citations

127

H-Index

5

Active since

1985

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Physikalisch-Technische Bundesanstalt

H.-C. Petzold is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, materials engineering, and electronic materials.

Publications per year

1985–1992

5

Publications

5

Electron-beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics

K. T. Kohlmann-von Platen, Leandro Buchmann, H.-C. Petzold et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 60 citations

, , +15

Ion-induced deposition for x-ray mask repair: Rate optimization using a time-dependent model

H.-C. Petzold, P.J. Heard · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 33 citations

, , +10

Microstructuring of gold on x-ray masks with focused Ga+ ion beams

Karl P. Muller, H.-C. Petzold · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 12 citations

, , +13

Soft x-ray radiation from laser-produced plasmas: characterization of radiation emission and its use in x-ray lithography

Michael Kühne, H.-C. Petzold · Applied Optics · 1988 · 12 citations

, , +13

Conversion efficiency of laser radiation into soft x-ray radiation of laser produced plasmas for x-ray lithography

M. Kühne, H.-C. Petzold · Microelectronic Engineering · 1985 · 10 citations

, , +17

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