Karl P. Muller

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Active since

1990

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Karl P. Muller is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, semiconductor devices, and materials engineering.

Publications per year

1990–2002

Publications

<title>Oxygen reactive ion etching of polymers: profile evolution and process mechanisms</title>

W. Pilz, Joachim Janes, Karl P. Muller et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1991 · 14 citations

Engineering, Materials Engineering, Materials Science +17

Microstructuring of gold on x-ray masks with focused Ga+ ion beams

Karl P. Muller, H.-C. Petzold · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1990 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +13

Subresolution assist feature implementation for high-performance logic gate-level lithography

Allen H. Gabor, James A. Bruce, W. H. Chu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 10 citations

Engineering, Computer Engineering, Electrical Engineering +14

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