Concepedia

J. Chlebek

JC

Statistics

Publications

4

Citations

212

H-Index

4

Active since

1989

Affiliations

University of Bonn(Current)

J. Chlebek is an author at University of Bonn specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsPhysicsSurface ScienceMaterial ScienceMicroscopyAtomic PhysicsInstrumentationMicroelectronicsMicrofabrication

Publications per year

1989–1994

4

Publications

4

Parity violation in proton-proton scattering at 13.6 MeV

P.D. Eversheim, W. Schmitt, Sebastian P. Kühn et al. · Physics Letters B · 1991 · 90 citations

High-energy Nuclear Reaction, Physics, Natural Sciences +3

Resolution limits in electron-beam induced tungsten deposition

K. T. Kohlmann-von Platen, J. Chlebek, K. Reimer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 81 citations

Materials Science, Electron-beam Induced Tungsten, Electron-beam Induced Deposition +14

Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base

F. J. Pantenburg, J. Chlebek, A. El‐Kholi et al. · Microelectronic Engineering · 1994 · 31 citations

Materials Science, Adhesion Problems, Engineering +11

Computer-aided resist modelling with extended XMAS in x-ray lithography

J. Chlebek, H.‐L. Huber, H. Oertel et al. · Microelectronic Engineering · 1989 · 10 citations

Engineering, Electron-beam Lithography, Resistor +7

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