Concepedia

A. El‐Kholi

AE

Statistics

Publications

12

Citations

273

H-Index

11

Active since

1992

Affiliations

FZI Research Center for Information Technology(Current)

A. El‐Kholi is an author at FZI Research Center for Information Technology specializing in engineering, materials science, and microfabrication.

Top concepts

EngineeringMaterial ScienceMicrofabricationMicrostructure3D PrintingMechanical EngineeringApplied PhysicsRadiation EffectsMicroscopySynchrotron Radiation

Publications per year

1992–2002

12

Publications

12

Molding of three dimensional microstructures by the LIGA process

Marc Harmening, W. Bacher, P. Bley et al. · 1992 · 39 citations

Engineering, Resist Layer, Biomedical Engineering +16

New development strategies for high aspect ratio microstructures

J. Zanghellini, Sven Achenbach, A. El‐Kholi et al. · Microsystem Technologies · 1998 · 34 citations

Materials Science, Wafer Scale Processing, New Development Strategies +7

Investigations of the development rate of irradiated PMMA microstructures in deep X-ray lithography

Pascal Meyer, A. El‐Kholi, Joachim Schulz · Microelectronic Engineering · 2002 · 34 citations

Materials Science, Engineering, Electron-beam Lithography +11

Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base

F. J. Pantenburg, J. Chlebek, A. El‐Kholi et al. · Microelectronic Engineering · 1994 · 31 citations

Materials Science, Adhesion Problems, Engineering +11

High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Jens Fahrenberg, T. Schaller, W. Bacher et al. · Microsystem Technologies · 1996 · 21 citations

Materials Science, High Aspect, Engineering +11

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