Concepedia

A. El‐Kholi

AE

12

Publications

273

Citations

11

H-Index

1992

Active since

Affiliations

FZI Research Center for Information Technology(Current)

A. El‐Kholi is an author at FZI Research Center for Information Technology specializing in engineering, materials science, and microfabrication.

Top concepts

Publications per year

1992–2002

12

Publications

12

Molding of three dimensional microstructures by the LIGA process

Marc Harmening, W. Bacher, P. Bley et al. · 1992 · 39 citations

, , +16

New development strategies for high aspect ratio microstructures

J. Zanghellini, Sven Achenbach, A. El‐Kholi et al. · Microsystem Technologies · 1998 · 34 citations

, , +7

Investigations of the development rate of irradiated PMMA microstructures in deep X-ray lithography

Pascal Meyer, A. El‐Kholi, Joachim Schulz · Microelectronic Engineering · 2002 · 34 citations

, , +11

Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base

F. J. Pantenburg, J. Chlebek, A. El‐Kholi et al. · Microelectronic Engineering · 1994 · 31 citations

, , +11

High aspect ratio multi-level mold inserts fabricated by mechanical micro machining and deep etch X-ray lithography

Jens Fahrenberg, T. Schaller, W. Bacher et al. · Microsystem Technologies · 1996 · 21 citations

, , +11

Rows per page

1–5 of 12