Concepedia
Statistics
Publications
28
Citations
591
H-Index
15
Active since
1998
Affiliations
University of Saskatchewan(Current)
Canadian Light Source (Canada)
Fraunhofer Institute for Microengineering and Microsystems
Karlsruhe Institute of Technology
FZI Research Center for Information Technology
Sven Achenbach is an author at University of Saskatchewan specializing in engineering, applied physics, and microfabrication.
Top concepts
EngineeringMicrofabricationApplied PhysicsMaterial ScienceMicroelectronicsElectrical Engineering3D PrintingMicroscopyMicrofluidicsMicrostructure
Publications per year
1998–2023
Influence of developer temperature and resist material on the structure quality in deep x-ray lithography
F. J. Pantenburg, Sven Achenbach, J. Mohr · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 51 citations
Engineering, Electron-beam Lithography, Microscopy +21
Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers
V. Nazmov, E. Reznikova, J. Mohr et al. · Microsystem Technologies · 2004 · 51 citations
Materials Science, Optical Materials, X-ray Spectroscopy +11
FixReF: A control strategy for offshore wind farms with different wind turbine types and diode rectifier HVDC transmission
Cord Prignitz, Hans-Günter Eckel, Sven Achenbach et al. · 2016 · 45 citations
Electrical Engineering, Control Strategy, Engineering +14
Characterisation of defects in very high deep-etch X-ray lithography microstructures
F. J. Pantenburg, Sven Achenbach, Jürgen Mohr · Microsystem Technologies · 1998 · 40 citations
Materials Science, Engineering, Electron-beam Lithography +9
New development strategies for high aspect ratio microstructures
J. Zanghellini, Sven Achenbach, A. El‐Kholi et al. · Microsystem Technologies · 1998 · 34 citations
Materials Science, Wafer Scale Processing, New Development Strategies +7
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