Concepedia

Sven Achenbach

SA

Statistics

Publications

28

Citations

591

H-Index

15

Active since

1998

Affiliations

University of Saskatchewan(Current)

Canadian Light Source (Canada)

Fraunhofer Institute for Microengineering and Microsystems

Karlsruhe Institute of Technology

FZI Research Center for Information Technology

Sven Achenbach is an author at University of Saskatchewan specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringMicrofabricationApplied PhysicsMaterial ScienceMicroelectronicsElectrical Engineering3D PrintingMicroscopyMicrofluidicsMicrostructure

Publications per year

1998–2023

28

Publications

28

Influence of developer temperature and resist material on the structure quality in deep x-ray lithography

F. J. Pantenburg, Sven Achenbach, J. Mohr · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 51 citations

Engineering, Electron-beam Lithography, Microscopy +21

Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers

V. Nazmov, E. Reznikova, J. Mohr et al. · Microsystem Technologies · 2004 · 51 citations

Materials Science, Optical Materials, X-ray Spectroscopy +11

FixReF: A control strategy for offshore wind farms with different wind turbine types and diode rectifier HVDC transmission

Cord Prignitz, Hans-Günter Eckel, Sven Achenbach et al. · 2016 · 45 citations

Electrical Engineering, Control Strategy, Engineering +14

Characterisation of defects in very high deep-etch X-ray lithography microstructures

F. J. Pantenburg, Sven Achenbach, Jürgen Mohr · Microsystem Technologies · 1998 · 40 citations

Materials Science, Engineering, Electron-beam Lithography +9

New development strategies for high aspect ratio microstructures

J. Zanghellini, Sven Achenbach, A. El‐Kholi et al. · Microsystem Technologies · 1998 · 34 citations

Materials Science, Wafer Scale Processing, New Development Strategies +7

Rows per page

1–5 of 28