F. J. Pantenburg

Kinoform X-ray lens creation in polymer materials by deep X-ray lithography

V. Nazmov, L. Shabelnikov, F. J. Pantenburg et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 53 citations

Materials Science, X-ray Crystallography, X-ray Spectroscopy +12

Influence of developer temperature and resist material on the structure quality in deep x-ray lithography

F. J. Pantenburg, Sven Achenbach, J. Mohr · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 51 citations

Engineering, Electron-beam Lithography, Microscopy +21

Influence of secondary effects on the structure quality in deep X-ray lithography

F. J. Pantenburg, J. Mohr · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1995 · 45 citations

Materials Science, Engineering, Electron-beam Lithography +11

Characterisation of defects in very high deep-etch X-ray lithography microstructures

F. J. Pantenburg, Sven Achenbach, Jürgen Mohr · Microsystem Technologies · 1998 · 40 citations

Materials Science, Engineering, Electron-beam Lithography +9

New development strategies for high aspect ratio microstructures

J. Zanghellini, Sven Achenbach, A. El‐Kholi et al. · Microsystem Technologies · 1998 · 34 citations

Materials Science, Wafer Scale Processing, New Development Strategies +7