Concepedia

Marc Harmening

MH

Statistics

Publications

3

Citations

131

H-Index

3

Active since

1992

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Marc Harmening is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, microfabrication, and 3d printing.

ORCID

Top concepts

Publications per year

1992–2002

3

Publications

3

The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding

Wolfgang Menz, W. Bacher, Marc Harmening et al. · 2002 · 80 citations

, , +18

Molding of three dimensional microstructures by the LIGA process

Marc Harmening, W. Bacher, P. Bley et al. · 1992 · 39 citations

, , +16

Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures : Micro/nanofabrication and Devices

P. Bley, Wolfgang Menz, W. Bacher et al. · JJAP series · 1992 · 12 citations

, , +10

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