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Application of the LIGA Process in Fabrication of Three-Dimensional Mechanical Microstructures : Micro/nanofabrication and Devices
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1992
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Materials ScienceThree-dimensional Mechanical MicrostructuresEngineeringMicromachinesMicrofabricationMechanical EngineeringFabrication TechniqueMicroscale SystemNanofabricationMicrofluidics3D Bioprinting3D PrintingLiga Process
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