H.‐L. Huber

Statistics

Publications

Citations

446

H-Index

Active since

1963

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Gesundes Kinzigtal (Germany)

Philips (Germany)

Fraunhofer-Gesellschaft

Fraunhofer Institute for Surface Engineering and Thin Films

H.‐L. Huber is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in materials science, materials engineering, and x-ray optics.

Publications per year

1963–2005

Publications

A Systematic Approach to Material Eligibility for the Cold-Spray Process

Jiřı́ Vlček, Leticia Gimeno, H.‐L. Huber et al. · Journal of Thermal Spray Technology · 2005 · 133 citations

Engineering, Materials Engineering, Materials Science +9

Galvanoplated 3D structures for micro systems

Bernd Löchel, M. König, Hans-Joachim Quenzer et al. · Microelectronic Engineering · 1994 · 39 citations

Engineering, Materials Engineering, Materials Science +7

Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base

F. J. Pantenburg, J. Chlebek, A. El‐Kholi et al. · Microelectronic Engineering · 1994 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +14

Radiation damage effects in boron nitride mask membranes subjected to x-ray exposures

WS Johnson, R. Lévy, Douglas J. Resnick et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 30 citations

Engineering, Materials Engineering, Materials Science +15

Highly-sensitive novolak-based positive X-ray resist

K.-F. Dössel, H.‐L. Huber, H. Oertel · Microelectronic Engineering · 1986 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +3

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