H.‐L. Huber

Statistics

Publications

Citations

446

H-Index

Active since

1963

Affiliations

Fraunhofer Institute for Microengineering and Microsystems(Current)

Gesundes Kinzigtal (Germany)

Philips (Germany)

Fraunhofer-Gesellschaft

Fraunhofer Institute for Surface Engineering and Thin Films

H.‐L. Huber is an author at Fraunhofer Institute for Microengineering and Microsystems specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsMicrofabricationMicroscopyOptical PropertiesSynchrotron RadiationPhysicsX-ray ImagingOptoelectronics

Publications per year

1963–2005

Publications

A Systematic Approach to Material Eligibility for the Cold-Spray Process

Jiřı́ Vlček, Leticia Gimeno, H.‐L. Huber et al. · Journal of Thermal Spray Technology · 2005 · 133 citations

Materials Science, Thermal Spray Coating, Engineering +3

Galvanoplated 3D structures for micro systems

Bernd Löchel, M. König, Hans-Joachim Quenzer et al. · Microelectronic Engineering · 1994 · 39 citations

Materials Science, Geometric Modeling, Engineering +9

Adhesion problems in deep-etch x-ray lithography caused by fluorescence radiation from the plating base

F. J. Pantenburg, J. Chlebek, A. El‐Kholi et al. · Microelectronic Engineering · 1994 · 31 citations

Materials Science, Adhesion Problems, Engineering +11

Radiation damage effects in boron nitride mask membranes subjected to x-ray exposures

WS Johnson, R. Lévy, Douglas J. Resnick et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 30 citations

X-ray Spectroscopy, Engineering, Cubic Boron Nitride +19

Highly-sensitive novolak-based positive X-ray resist

K.-F. Dössel, H.‐L. Huber, H. Oertel · Microelectronic Engineering · 1986 · 26 citations

Materials Science, X-ray Spectroscopy, Engineering +4

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