Concepedia
Microelectronic Engineering · 1994 · 39 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceMicroelectromechanical SystemsMicrofabricationMicrofabrication MaterialsMicrofabrication ProcessesMicroinstruction DesignMicroscale ArchitectureMicroscale Fabrication
1
Fabrication of magnetic microstructures by using thick layer resists
Bernd Löchel, M. König, H.‐L. Huber et al. · Microelectronic Engineering · 1993 · 14 citations
Natural Sciences, Materials Engineering, Materials Science +11