Concepedia

Publication | Open Access

Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum

DOIFull Paper Access

40

Citations

14

References

1994

Year

V.P. Jaecklin, Christian Linder, Juergen Brügger, N. F. de Rooij, J.-M. Moret, R. Vuilleumier
Sensors and Actuators A Physical

References

YearCitations

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