R. Vuilleumier

Line-addressable torsional micromirrors for light modulator arrays

V.P. Jaecklin, Christian Linder, N. F. de Rooij et al. · Sensors and Actuators A Physical · 1994 · 49 citations · Full text

Photonics, Engineering, Applied Physics +4

Monolithic optical position encoder with on-chip photodiodes

Pascal Aubert, H. Oguey, R. Vuilleumier · IEEE Journal of Solid-State Circuits · 1988 · 44 citations

Engineering, Integrated Circuits, Image Sensor +17

Mechanical and optical properties of surface micromachined torsional mirrors in silicon, polysilicon and aluminum

V.P. Jaecklin, Christian Linder, Juergen Brügger et al. · Sensors and Actuators A Physical · 1994 · 40 citations · Full text

Materials Science, Optical Materials, Engineering +12

Design aspects of MOS-controlled thyristor elements: technology, simulation, and experimental results

F. Bauer, E. Halder, K.R. Hofmann et al. · IEEE Transactions on Electron Devices · 1991 · 38 citations

Engineering, Design Aspects, Integrated Circuits +18

Optical microshutters and torsional micromirrors for light modulator arrays

V.P. Jaecklin, Christian Linder, Ν. F. de Rooij et al. · 2002 · 33 citations · Full text

Optical Materials, Engineering, Optic Design +20