Optical microshutters and torsional micromirrors for light modulator arrays

Abstract

The fabrication and operation of surface micromachined light modulators are described. In particular, comb-driven polysilicon microshutters for interrupting a focused laser beam of 5 mu m in diameter are characterized. The shutters are suspended by novel compact meander springs, which favor their application in dense light modulator arrays. Torsional micromirrors working in a reflection mode, having two mirror states, were realized using the same technology. Electrical pulses of less than 2 mu s are sufficient to switch the mirror position.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>