Journal of Crystal Growth · 2001 · 39 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor SurfacesSilicon MaterialsArea-selective DepositionDevice FabricationEpitaxial Growth Of Wide-bandgap SemiconductorsGallium Nitride (Gan) MaterialsGallium Nitride Crystal GrowthSelective Area EpitaxySubstrate Patterning
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Shota Kitamura, Kazumasa Hiramatsu, Nobuhiko Sawaki Nobuhiko Sawaki · Japanese Journal of Applied Physics · 1995 · 181 citations