Concepedia

Selective Area Epitaxy

Selective Area Epitaxy is a thin-film growth technique in which epitaxial layers are selectively deposited on exposed semiconductor surfaces through patterned dielectric masks, enabling spatially controlled nucleation and growth while suppressing deposition on masked regions.

331

Publications

12.3K

Citations

1.4K

Authors

278

Institutions

Publications per year

2017–2026

67

Variants

Sae

Parents

Publications

331

Extreme selectivity in the lift-off of epitaxial GaAs films

Eli Yablonovitch, T.J. Gmitter, J. P. Harbison et al. · Applied Physics Letters · 1987 · 806 citations · Full text

, , +17

Control of InAs Nanowire Growth Directions on Si

Katsuhiro Tomioka, Junichi Motohisa, Shinjiro Hara et al. · Nano Letters · 2008 · 349 citations

, , +16

Anisotropic epitaxial lateral growth in GaN selective area epitaxy

D. Kapolnek, S. Keller, R. Vetury et al. · Applied Physics Letters · 1997 · 302 citations

, , +15

Improved Ti-mask selective-area growth (SAG) by rf-plasma-assisted molecular beam epitaxy demonstrating extremely uniform GaN nanocolumn arrays

Katsumi Kishino, Hiroto Sekiguchi, Akihiko Kikuchi · Journal of Crystal Growth · 2008 · 272 citations

, , +12

Catalyst-free growth of GaAs nanowires by selective-area metalorganic vapor-phase epitaxy

J. Noborisaka, Junichi Motohisa, Takashi Fukui · Applied Physics Letters · 2005 · 247 citations · Full text

, , +16

1–5 of 331

Authors

1.4K

  1. TF
    Takashi Fukui

    Hokkaido University, Japan

    19 publications · 1.3K citations

    16

    h-index

  2. JM
    Junichi Motohisa

    Hokkaido University, Japan

    15 publications · 1.2K citations

    14

    h-index

  3. SH
    Shinjiro Hara

    Hokkaido University, Japan

    12 publications · 778 citations

    12

    h-index

  4. CJ
    C. Jagadish

    Australian National University, Australia

    11 publications · 616 citations

    11

    h-index

  5. HH
    Hark Hoe Tan

    Australian National University, Australia

    10 publications · 596 citations

    10

    h-index

1–5 of 1.4K

Institutions

278

  1. Hokkaido University

    Sapporo, Japan

    16 h-index

    97 publications

    5.8K citations

  2. IMEC

    Leuven, Belgium

    12 h-index

    104 publications

    3.6K citations

  3. Centre National de la Recherche Scientifique

    Paris, France

    12 h-index

    63 publications

    1.4K citations

  4. Japan Science and Technology Agency

    Tokyo, Japan

    11 h-index

    23 publications

    1.9K citations

  5. University of Illinois Urbana-Champaign

    Urbana, United States

    11 h-index

    45 publications

    1.3K citations

  6. Australian National University

    Canberra, Australia

    11 h-index

    74 publications

    4.9K citations

  7. KU Leuven

    Leuven, Belgium

    11 h-index

    30 publications

    973 citations

  8. The University of Tokyo

    Tokyo, Japan

    11 h-index

    40 publications

    816 citations

1–8 of 278

Venues

  1. Applied Physics Letters

    55 publications · 2.9K citations

    26

    h-index

  2. Journal of Crystal Growth

    66 publications · 1.8K citations

    24

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 24 publications · 663 citations

    16

    h-index

  4. Nano Letters

    18 publications · 1.5K citations

    16

    h-index

  5. Journal of Applied Physics

    16 publications · 510 citations

    13

    h-index

1–5